JPH0421857B2 - - Google Patents

Info

Publication number
JPH0421857B2
JPH0421857B2 JP57079617A JP7961782A JPH0421857B2 JP H0421857 B2 JPH0421857 B2 JP H0421857B2 JP 57079617 A JP57079617 A JP 57079617A JP 7961782 A JP7961782 A JP 7961782A JP H0421857 B2 JPH0421857 B2 JP H0421857B2
Authority
JP
Japan
Prior art keywords
light
order light
photoresist
image sensor
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57079617A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58195848A (ja
Inventor
Seiji Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7961782A priority Critical patent/JPS58195848A/ja
Publication of JPS58195848A publication Critical patent/JPS58195848A/ja
Publication of JPH0421857B2 publication Critical patent/JPH0421857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP7961782A 1982-05-11 1982-05-11 自動現像装置 Granted JPS58195848A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7961782A JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7961782A JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Publications (2)

Publication Number Publication Date
JPS58195848A JPS58195848A (ja) 1983-11-15
JPH0421857B2 true JPH0421857B2 (en]) 1992-04-14

Family

ID=13695011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7961782A Granted JPS58195848A (ja) 1982-05-11 1982-05-11 自動現像装置

Country Status (1)

Country Link
JP (1) JPS58195848A (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230429A (en) * 1975-09-03 1977-03-08 Canon Inc Photographic image recording and processing system
JPS56145332A (en) * 1980-04-12 1981-11-12 Victor Co Of Japan Ltd Detecting device for state of proper development

Also Published As

Publication number Publication date
JPS58195848A (ja) 1983-11-15

Similar Documents

Publication Publication Date Title
US5450387A (en) Optical pickup apparatus for phase changing optical disk
JPH07118099B2 (ja) 予じめ形成された光学的に検出可能なサーボトラツク部分とセクタアドレスを有する記録担体及びこの記録担体構造を記録するための装置
US4547875A (en) Optical recording and retrieving disc
JPH0430094B2 (en])
JPH0421857B2 (en])
JPH0438720A (ja) 光学式多値記録再生方式
US20010036134A1 (en) Optical disk having pits of different depths formed therein, optical disk reproducing apparatus for reproducing the optical disk, and method of tracking the optical disk
JP2005322400A (ja) サーボ機能を有するホログラフィックｒｏｍ再生機
KR100458727B1 (ko) 광기록매체
EP0502533B1 (en) Apparatus for developing photoresist
US6373797B1 (en) Optical information recording/reproducing apparatus based on tracking control of irradiated light
US5224082A (en) Method for detecting tracking error in optical disk system and its optical system devices thereof
US6313453B1 (en) Glassmastering photoresist read after write method and system
EP0330481B1 (en) Method for detecting tracking error in optical disk system and its optical system devices therefor
JP2822554B2 (ja) 検出装置
JPH0551898B2 (en])
JPH10162383A (ja) 光ディスク記録再生装置および光ディスク再生装置
JP3397880B2 (ja) 光ピックアップ装置
US20020022192A1 (en) Glassmastering photoresist read after write method and system
CN100470645C (zh) 光拾取装置
JPH01162254A (ja) 光ディスク原盤の製造方法
JP2511736Y2 (ja) 光ディスク原盤の現像装置
JPH09145326A (ja) 光ディスク原盤の溝パラメータ測定方法・測定装置、製造方法、及び、現像方法・現像装置
JP3444284B2 (ja) 光ディスク再生装置
JP2836900B2 (ja) 光ディスク記録再生装置および記録再生方法